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Cluster Lab - UHV Integrated Laboratory

The UHV (Ultra High Vacuum) Cluster Lab is the result of an internal project which aimed at the implementation of an integrated laboratory where deposition and characterization facilities were connected in UHV conditions in order to allow in situ analyses of the deposited/treated materials. This to avoid any air exposure of the samples before the analyses and to enhance deposition control by permitting the direct transfer of the substrates between the deposition and the analyses chambers.

The Cluster Lab is currently connecting two plasma reactors (the PVD/PECVD reactor and the Micro-combi  reactor) to the ESCA 200 XPS spectrometer, via an interconnection chamber and a fully automated sample transfer system which are all maintained in UHV pressure conditions.

  • The Cluster lab

  • UHV tranfer system

  • Deposition and analysis

  • Transferring samples to the interconnection chamber