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Related projects
Publications
  1. R. Brusa; C. Macchi; S. Mariazzi; G. Karwasz; N. Laidani; R. Bartali; M. Anderle,
    Amorphous carbon film growth on Si: Correlation between stress and generation of defects into the substrate,
    in «APPLIED PHYSICS LETTERS»,
    vol. 86,
    n. 22,
    2005
    , pp. 221906 -
  2. C. Macchi; S. Mariazzi; A. Zecca; G. Karwasz; R. Brusa; N. Laidani; R. Bartali; G. Gottardi; M. Anderle,
    Stress and interfacial defects induced by amorphous carbon film growth on silicon,
    in «DIAMOND AND RELATED MATERIALS»,
    vol. 14,
    n. 3-7,
    2005
    , pp. 1036 -
    1040
  3. G. Gottardi; N. Laidani; R. Bartali; M. Filippi; L. Calliari; R. Brusa; S. Mariazzi; C. Macchi; M. Anderle,
    Amorphous carbon films PACVD in CH4-CO2 under pulsed and continous substrate bias conditions,
    in «DIAMOND AND RELATED MATERIALS»,
    vol. 14,
    n. 3-7,
    2005
    , pp. 1031 -
    1035
  4. N. Laidani; R. Bartali; M. Anderle; P. Chiggiato; G. Chuste,
    Carbon film deposition on polyethylene terephtalate by pulsed-plasma technology,
    in «DIAMOND AND RELATED MATERIALS»,
    vol. 14,
    n. 3-7,
    2005
    , pp. 1023 -
    1030
  5. L. Calliari; M. Filippi; G. Gottardi; N. Laidani; M. Anderle,
    An electron spectroscopy study of a-C:H films produced by PACVD in a CH4-CO2 gas mixture,
    in «SURFACE SCIENCE»,
    vol. 586,
    n. 1-3,
    2005
    , pp. 96 -
    108
  6. V. Micheli; N. Laidani; R. Bartali; G. Gottardi; M. Anderle,
    Auger Depth Profiling optimization on plasma-deposited carbon multilayers,
    Proceedings of the 17th International Symposium on Plasma Chemistry,
    IPCS,
    2005
    , pp. 561-
    562
    , (ISPC 17 (17th International Symposium on Plasma Chemistry),
    Toronto, Canada,
    August 2005)
  7. N. Laidani; R. Bartali; P. Tosi; M. Anderle,
    Argon-Hydrogen rf plasma study for carbon film deposition,
    in «JOURNAL OF PHYSICS D. APPLIED PHYSICS»,
    vol. 37,
    n. 18,
    2004
    , pp. 2593 -
    2606
  8. G. Speranza; N. Laidani,
    Measurement of the relative abundance of sp2 and sp3 hybridised atoms in carbon based materials by XPS: a critical approach. Part I,
    in «DIAMOND AND RELATED MATERIALS»,
    vol. 13,
    n. 3,
    2004
    , pp. 445 -
    450
  9. G. Speranza; N. Laidani,
    Measurement of the relative abundance of sp2 and sp3 hybridised atoms in carbon based materials by XPS: a critical approach. Part II,
    in «DIAMOND AND RELATED MATERIALS»,
    vol. 13,
    n. 3,
    2004
    , pp. 451 -
    458
  10. L. Calliari; M. Filippi; N. B. Laidani,
    Electron beam irradiation of hydrogenated amorphous carbon films,
    in «SURFACE AND INTERFACE ANALYSIS»,
    vol. 36,
    2004
    , pp. 1126 -
    1129

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